E-UMS130-X High-Precision, Low-Profile Linear Motor Translation Stage Direct Drive with Direct Position Measuring

Product Description

E-UMS***-X High-Precision, Low-Profile Linear Motor Translation Stage
Direct Drive with Direct Position Measuring
Nanopositioning Performance and High Speed in a Compact, Affordable Stage Design
Linear travel ranges *0, **0, and **0 mm
Minimum incremental linear motion to *0 nm
High precision position encoder options: Incremental and absolute measuring
Compact size: **5 mm × *5 mm cross section
Crossed roller guides for high load capacity and high geometric performance
ironless *-phase linear motors

E-UMS***-X series adopts high-precision cross roller guide rail with anti-creep function, cooperates with linear motor and high-resolution grating scale, and has the advantages of small size, large load and low noise. The anti-creep cross roller guideway is especially suitable for applications requiring fine-step travel, with
The high-performance drive control system can stably step out at a step size of *0nm, which is an important performance that is difficult to guarantee for ordinary linear guide rail linear motor platforms. Therefore, the UMS***-X series is especially suitable for high-precision positioning, detection, exposure and micro-processing application scenarios.
● Non-contact direct drive motor, ultra-high precision and excellent dynamic performance
● Ironless motor, the speed fluctuation is less than one thousandth (combined with the specified type of drive, laboratory environment test data)
● Quiet and anti-creep guide rails to ensure micro-step control

● Long service life, maintenance-free use for a long time
Highly accurate position measuring with incremental linear encoder

There is a choice of cost-efficient incremental encoders,  metrology-class Incremental encoders and absolute measuring encoders (no referencing on power up required). Since the linear position of the stage is measured directly at the moving platform against the stationary base, without contact (direct metrology), backlash, mechanical play, or deformation in the drive train as common with motor / leadscrew combinations have no influence on position accuracy.
Crossed roller guide
With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep
Multi-Axis Stage Combinations: XY and XYZ