Tantalum- tungsten alloy
sputtering target (Ta2.5W， Ta7.5W， Ta*0W)
Tantalum- tungsten alloy sputtering disc (Ta2.5W， Ta7.5W，
Ta*0W)
Material: RO***2(Ta*2.5W)，
RO***5(Ta**0W) Size:
circular targets: *5mm up to **0mm Diameter x 3mm up to *8mm
Thickness (1” – *6” diameter x 0.***1” – 1” thickness)
rectangular targets: 1mm up to *5.4mm Thickness x Width up to
***0mm x Length up to ***0mm (.*4” – 1” thick x width up to *3.*2”
x length up to *0”);
Recrystallization: *5％min
Grain size: ASTM 4 or finer
Surface finish: *6Rms max. or Ra 0.4 ( RMS*4 or better)
Flatness: 0.1mm or 0.*5％ max.
Special requirements to be agreed on by the supplier and buyer of
negotiations
